Kim, H., Kim, Y., Ito, Y. and Sugita, N. (2026). Robust Zernike aberration sensing method based on deep learning for precision interferometric glass thickness profiling. Measurement 263 120062.

Manufacturing Laboratory, the University of Tokyo
Kim, H., Kim, Y., Ito, Y. and Sugita, N. (2026). Robust Zernike aberration sensing method based on deep learning for precision interferometric glass thickness profiling. Measurement 263 120062.