Jeon, J., Kim, Y., & Sugita, N. (2023). Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning. Journal of Mechanical Science and Technology. https://doi.org/10.1007/s12206-023-0833-7
Manufacturing Laboratory, the University of Tokyo
Jeon, J., Kim, Y., & Sugita, N. (2023). Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning. Journal of Mechanical Science and Technology. https://doi.org/10.1007/s12206-023-0833-7