Hattori, J., Ito, Y., Nagato, K., & Sugita, N. (2021). Investigation of damage generation process by stress waves during femtosecond laser drilling of SiC. Precision Engineering.
Manufacturing Laboratory, the University of Tokyo
Manufacturing Laboratory, the University of Tokyo
Hattori, J., Ito, Y., Nagato, K., & Sugita, N. (2021). Investigation of damage generation process by stress waves during femtosecond laser drilling of SiC. Precision Engineering.