Paper : Optics Communications

Kim, S., Kim, Y., Hibino, K., Sugita, N., & Mitsuishi, M. (2022). Simultaneous thickness and surface profiling of blank mask and its experimental verification using robust harmonic fringe-iterative algorithm and fizeau interferometer. Optics Communications, 128460. https://doi.org/10.1016/j.optcom.2022.128460

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