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Paper : Optics & Laser Technology
Bae, W., Kim, Y., Ahn, S., Ito, Y., & Sugita, N. (2024). Scanning interferometric phase-calculation formula for simultaneous topographic profiling of thickness and surface of optical flats. Optics & Laser Technology, 169, 110082. https://doi.org/10.1016/j.optlastec.2023.110082
Paper : Journal of Mechanical Science and Technology
Jeon, J., Kim, Y., & Sugita, N. (2023). Influence of windows on the phase error of interferometric surface topography of a wafer using wavelength scanning. Journal of Mechanical Science and Technology. https://doi.org/10.1007/s12206-023-0833-7