Bae, W., Kim, Y., Ahn, S., Ito, Y., & Sugita, N. (2024). Scanning interferometric phase-calculation formula for simultaneous topographic profiling of thickness and surface of optical flats. Optics & Laser Technology, 169, 110082. https://doi.org/10.1016/j.optlastec.2023.110082
Manufacturing Laboratory, the University of Tokyo